前驅體

  1. 前驅體
one two four
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    螢幕擷取畫面 2024-08-12 090446.png

    precursor

     

    Alpha-terpinene (ATRP)

    Purity >7N5

    CVD Low k 薄膜 

    Logic, Memory (DRAM, NAND, 3D NAND)





     

    Diethoxymethylsilane (DEMS)

    Purity >8N

    CVD Low k 薄膜, 矽介電層

    Logic, Memory (DRAM, NAND, 3D NAND)