蝕刻矽電極、聚焦環
代理世界最大蝕刻矽零件供應商
CEL ,OUTER(TE)
- Equipment TEL TE Etcher
- OEM Part No. 3D10-202375-12
- Material Poly Silicon
- Resistivity 1~20Ω.cm
- Dimenson Ф379.9 × 14.2T
FOCUS RING
- Equipment TEL SHIN Etcher
- OEM Part No. 3D10-250318-11
- Material Single Crystal Silicon
- Resistivity 1~10Ω.cm
- Dimenson Ф360 × 3.5T
RING Protection(TE-RP470)
- Equipment TEL SHIN Etcher
- OEM Part No. 3D10-350067-1
- Material Poly Silicon
- Resistivity 1~20Ω.cm
- Dimenson Ф470 × 10T
One Piece Shield Ring
- Equipment VARIAN Ion Implant
- OEM Part No. E17408290,etc.
- Material Single Crystal Silicon
- Resistivity <0.1Ω.cm
- Dimenson Ф392.7 × 6.7T
Electrode,Upper(LD-777)
- Equipment TEL LLDX Etcher
- OEM Part No. 1810-121988-11
- Material Single Crystal Silicon
- Resistivity 75±15Ω.cm
- Dimenson Ф320 × 10T
- Gas Hole Ф0.5 × 777EA
CEL,OX T10-75-C912 (COC-N)
- Equipment TEL SE Etcher
- OEM Part No. 3D10-302020-11
- Material Single Crystal Silicon
- Resistivity 75±15Ω.cm
- Dimenson Ф376 × 10T
- Gas Hole Ф0.5 × 912EA
CEL ,INNER(TE-T10-P-LABY)
- Equipment TEL TE Etcher
- OEM Part No. 3D10-202364-12
- Material Single Crystal Silicon
- Resistivity 75±15Ω.cm
- Dimenson Ф311 × 10T
- Gas Hole Ф0.5 × 738EA
(SI-SHIN)CEL INNER (SH-OX1.76)
- Equipment TEL SHIN Etcher
- OEM Part No. 3D10-250316-21
- Material Single Crystal Silicon
- Resistivity 75±15Ω.cm
- Dimenson Ф311 × 10T
- Gas Hole Ф0.5 × 1283EA
